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This series of polishing machines comprises floor-type high-precision single-sided polishing equipment. These machines are equipped with a polishing disc cooling and temperature monitoring system to ensure a constant temperature during the polishing process. Featuring easy-to-use controls and abundant configuration options, the equipment is used with copper, tin, glass, and stainless steel discs (turning tool system optional). It can also be used with different types of polishing solutions and is suitable for polishing various semiconductor materials.